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Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) Sensors Applications Volume 1 Sensors in Manufacturing Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) Sensors Applications Upcoming volumes: (cid:1) Sensors in Intelligent Buildings (cid:1) Sensors in Medicine and Health Care (cid:1) Sensors in Automotive Technology (cid:1) Sensors in Aerospace Technology (cid:1) Sensors in Environmental Technology (cid:1) Sensors in Household Appliances Related Wiley-VCH titles: W. Göpel, J. Hesse, J.N. Zemel Sensors Vol. 1–9 ISBN 3-527-26538-4 H. Baltes, W. Göpel, J. Hesse Sensors Update ISSN 1432-2404 Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) Sensors Applications Volume 1 Sensors in Manufacturing Edited by H.K. Tönshoff, I. Inasaki Series Editors: J. Hesse, J.W. Gardner, W. Göpel Weinheim – New York – Chichester – Brisbane – Singapore – Toronto Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) SeriesEditors (cid:1) This book was carefully produced. Nevertheless, authors,editorsandpublisherdonotwarrantthe Prof.Dr.J.Hesse informationcontainedthereintobefreeofer- CarlZeiss rors.Readersareadvisedtokeepinmindthat Postfach1380 statements,data,illustrations,proceduraldetails 73447 Oberkochen orotheritemsmay inadvertently beinaccurate. Germany Prof.J.W.Gardner LibraryofCongressCardNo.:applied for UniversityofWarwick DivisionofElectrical&ElectronicEngineering BritishLibraryCataloguing-in-Publication Data: CoventryCV7AL Acataloguerecordforthisbookisavailablefrom UnitedKingdom theBritishLibrary. Prof.Dr.W.Göpel(cid:1) DieDeutscheBibliothek–CIP-Cataloguing-in- InstitutfürPhysikalische Publication Data undTheoretische Chemie AcataloguerecordisavailablefromDieDeutsche UniversitätTübingen Bibliothek AufderMorgenstelle8 72076 Tübingen ©WILEY-VCHVerlagGmbH Germany D-69469Weinheim,2001 All rightsreserved(includingthoseoftranslation VolumeEditors inotherlanguages).Nopartofthisbookmaybe reproducedinany form–byphotoprinting,mi- Prof.Dr.H.K.Tönshoff crofilm,oranyothermeans–nortransmittedor InstitutfürFertigungstechnik translatedintomachinelanguage withoutwritten undSpanendeWerkzeugmaschinen permissionfromthepublishers.Registeredna- UniversitätHannover mes,trademarks,etc.usedinthisbook,even SchloßwenderStr.5 whennotspecificallymarkedassuch,arenotto 30159 Hannover beconsideredunprotectedbylaw. Germany printedintheFederalRepublicofGermany Prof.I.Inasaki printedonacid-freepaper FacultyofScience&Technology Composition K+VFotosatzGmbH, KeioUniversity D-64743Beerfelden 3-14-1 Hiyoshi,Kohoku-ku Printing Betz-Druck,D-64291Darmstadt Yokohama-shi Bookbinding Wilhelm Osswald&Co., Japan D-67433Neustadt ISBN 3-527-29558-5 Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki V Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) Preface to the Series As the use of microelectronics became increasingly indispensable in measurement and control technology, so there was an increasing need for suitable sensors. From the mid-Seventies onwards sensors technology developed by leaps and bounds and within ten years had reached the point where it seemed desirable to publish a survey of what had been achieved so far. At the request of publishers WILEY-VCH, the task of editing was taken on by Wolfgang Göpel of the Univer- sity of Tübingen (Germany), Joachim Hesse of Carl Zeiss (Germany) and Jay Ze- mel of the University of Philadelphia (USA), and between 1989 and 1995 a series called Sensors was published in 8 volumes covering the field to date. The material was grouped and presented according to the underlying physical principles and reflected the degree of maturity of the respective methods and products. It was written primarily with researchers and design engineers in mind, and new developments have been published each year in one or two supplementary volumes called Sensors Update. Both the publishers and the series editors, however, were agreed from the start that eventually sensor users would want to see publications only dealing with their own specific technical or scientific fields. Sure enough, during the Nineties we saw significant developments in applications for sensor technology, and it is now an indispensable part of many industrial processes and systems. It is timely, therefore, to launch a new series, Sensors Applications. WILEY-VCH again commis- sioned Wolfgang Göpel and Joachim Hesse to plan the series, but sadly Wolfgang Göpel suffered a fatal accident in June 1999 and did not live to see publication. We are fortunate that Julian Gardner of the University of Warwick has been able to take his place, but Wolfgang Göpel remains a co-editor posthumously and will not be forgotten. The series of Sensors Applications will deal with the use of sensors in the key technical and economic sectors and systems: Sensors in Manufacturing, Intelligent Buildings, Medicine and Health Care, Automotive Technology, Aerospace Technology, Environmental Technology and Household Appliances. Each volume will be edited by specialists in the field. Individual volumes may differ in certain respects as dic- tated by the topic, but the emphasis in each case will be on the process or system in question: which sensor is used, where, how and why, and exactly what the ben- efits are to the user. The process or system itself will of course be outlined and VI Preface to the Series the volume will close with a look ahead to likely developments and applications in the future. Actual sensor functions will only be described where it seems necessary for an understanding of how they relate to the process or system. The basic principles can always be found in the earlier series of Sensors and Sensors Update. The series editors would like to express their warm appreciation in the col- leagues who have contributed their expertise as volume editors or authors. We are deeply indebted to the publisher and would like to thank in particular Dr. Peter Gregory, Dr. Jörn Ritterbusch and Dr. Claudia Barzen for their constructive assistance both with the editorial detail and the publishing venture in general. We trust that our endeavors will meet with the reader’s approval. Oberkochen and Conventry, November 2000 Joachim Hesse Julian W. Gardner VII Preface to Volume 1 of “Sensors Applications” Manufacturing technology has undergone significant developments over the last decades aiming at improving precision and productivity. The development of nu- merical control (NC) technology in 1952 made a significant contribution to meet- ing these requirements. The practical application of NC machine tools have stim- ulated technological developments that make the tools more intelligent, and al- lows the machining process to be carried out with higher reliability. Today, thanks to the significant developments in sensor and computer technologies, it can be said that the necessary tools are available for achieving the adaptive control of manufacturing processes, assisted by monitoring systems, which was a dream in the 1950’s. For the following reasons, monitoring technology with reliable sensors is be- coming more and more important in modern manufacturing systems: (cid:1) Machine tools operate with speeds that do not allow manual intervention. How- ever, collisions or process failures may cause significant damage. (cid:1) Manufacturing systems have become larger in scale, and monitoring of such large-scale systems is already beyond the capability of human beings. (cid:1) Increase of labor costs and the shortage of skilled operators calls for operation of the manufacturing system with minimum human intervention; this requires the introduction of advanced monitoring systems. (cid:1) Ultra-precision manufacturing can only be achieved with the aid of advanced metrology and process monitoring technology. (cid:1) The use of sophisticated machine tools requires the integration of monitoring systems to prevent machine failure. (cid:1) Heavy-duty manufacturing processes with higher energy consumption should be conducted with minimum human intervention, from the safety point of view. In addition, (cid:1) Environmental consciousness in the manufacturing of today requires monitoring emissions from the process. This book deals with monitoring technologies in various manufacturing processes, and aims to provide the latest developments in those fields together with VIII Preface to Volume 1 of “Sensors Applications” the necessary principles behind these developments. We are convinced that the readers of this book, both in research institutes and in industry, can obtain infor- mation necessary for their research and developmental work. The editors wish to thank the specialists who contributed their expertise and forbearance during the various stages of preparation. In addition to the assistance of the authors, we would like to thank the staff of Wiley-VCH for their support. Hannover and Yokohama, November 2000 Hans Kurt Tönshoff Ichiro Inasaki Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki IX Copyright © 2001 Wiley-VCH Verlag GmbH ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic) Contents List of Contributors XVII 1 Fundamentals 1 1.1 Roles of Sensors in Manufacturing and Application Range 1 I. Inasaki, H. K. Tönshoff 1.1.1 Manufacturing 1 1.1.2 Unit Processes in Manufacturing 2 1.1.3 Sensors 3 1.1.4 Needs and Roles of Monitoring Systems 4 1.1.5 Trends 5 1.1.6 References 6 1.2 Principles of Sensors for Manufacturing 6 D. Dornfeld 1.2.1 Introduction 6 1.2.2 Basic Sensor Classification 10 1.2.3 Basic Sensor Types 13 1.2.3.1 Mechanical Sensors 13 1.2.3.2 Thermal Sensors 17 1.2.3.3 Electrical Sensors 17 1.2.3.4 Magnetic Sensors 18 1.2.3.5 Radiant Sensors 18 1.2.3.6 Chemical Sensors 18 1.2.4 New Trends – Signal Processing and Decision Making 19 1.2.4.1 Background 19 1.2.4.2 Sensor Fusion 21 1.2.5 Summary 23 1.2.6 References 23 1.3 Sensors in Mechanical Manufacturing – Requirements, Demands, Boundary Conditions, Signal Processing, Communication 24 T. Moriwaki 1.3.1 Introduction 24 1.3.2 Role of Sensors and Objectives of Sensing 24 1.3.3 Requirements for Sensors and Sensing Systems 27 X Contents 1.3.4 Boundary Conditions 31 1.3.5 Signal Processing and Conversion 32 1.3.5.1 Analog Signal Processing 32 1.3.5.2 AD Conversion 34 1.3.5.3 Digital Signal Processing 36 1.3.6 Identification and Decision Making 39 1.3.6.1 Strategy of Identification and Decision Making 39 1.3.6.2 Pattern Recognition 40 1.3.6.3 Neural Networks 41 1.3.6.4 Fuzzy Reasoning 42 1.3.7 Communication and Transmission Techniques 43 1.3.8 Human-Machine Interfaces 44 1.3.9 References 45 2 Sensors for Machine Tools and Robots 47 H.K. Tönshoff 2.1 Position Measurement 47 2.2 Sensors for Orientation 58 2.3 Calibration of Machine Tools and Robots 60 2.4 Collision Detection 62 2.5 Machine Tool Monitoring and Diagnosis 65 2.6 References 70 3 Sensors for Workpieces 71 3.1 Macro-geometric Features 71 A. Weckenmann 3.1.1 Mechanical Measurement Methods 72 3.1.1.1 Calipers 72 3.1.1.2 Protractors 73 3.1.1.3 Micrometer Gages 73 3.1.1.4 Dial Gages 75 3.1.1.5 Dial Comparators 76 3.1.1.6 Lever-type Test Indicators 76 3.1.2 Electrical Measuring Methods 76 3.1.2.1 Resistive Displacement Sensors 77 3.1.2.2 Capacitive Displacement Sensors 77 3.1.2.3 Inductive Displacement Sensors 78 3.1.2.4 Magnetic Incremental Sensors 81 3.1.2.5 Capacitive Incremental Sensors 81 3.1.2.6 Inductive Incremental Sensors 82 3.1.3 Electromechanical Measuring Methods 83 3.1.3.1 Touch Trigger Probe 84 3.1.3.2 Continuous Measuring Probe System 84 3.1.4 Optoelectronic Measurement Methods 86 3.1.4.1 Incremental Methods 86