11111111111111111111111111111111111111111111111111111111111111111111111111 (12) United States Patent (cid:9) (1o) Patent No.: (cid:9) US 9,245,726 B1 Herrero (cid:9) (45) Date of Patent: (cid:9) Jan. 26, 2016 (54) CONTROLLING CHARGED PARTICLES (56) References Cited WITH INHOMOGENEOUS ELECTROSTATIC FIELDS U.S. PATENT DOCUMENTS (71) Applicant: The United States of America as 4,126,782 A * 11/1978 Usami (cid:9) ................... HOIJ49A82 250/305 represented by the Administrator of 8,421,030 B2* 4/2013 Shadman (cid:9) ................ HOIJ 37/05 the National Aeronautics and Space 250/305 Administration, Washington, DC (US) 2003/0042416 At* 3/2003 Goembel (cid:9) .............. HOIJ 49/484 250/305 (72) Inventor: Federico A. Herrero, Glenn Dale, MD 2006/0113467 At* 6/2006 Yagita (cid:9) ................... HOIJ 37/317 250/290 (US) 2006/0113468 Al* 6/2006 Yagita (cid:9) ..................... HOIJ 37/05 250/290 (73) Assignee: The United States of America as 2008/0290287 At* 11/2008 David (cid:9) ................... HOIJ 49/025 represented by the Administrator of 250/396 R the National Aeronautics and Space 2011/0147585 At* 6/2011 Kholine (cid:9) ................ HOIJ 49/484 Administration, Washington, DC (US) 250/310 2011/0168886 Al* 7/2011 Shadman (cid:9) ................ HOIJ 37/05 (*) Notice: (cid:9) Subject to any disclaimer, the term of this 250/305 patent is extended or adjusted under 35 2013/0105687 Al* 5/2013 Cubric (cid:9) .................... HOIJ49/48 250/305 U.S.C. 154(b) by 0 days. * cited by examiner (21) Appl. No.: 14/497,247 (22) Filed: (cid:9) Sep. 25, 2014 Primary Examiner Bernard E Souw (51) Int. Cl. HOIJ 49122 (cid:9) (2006.01) (57) ABSTRACT HOIJ49126(cid:9) (2006.01) HOIJ 49128(cid:9) (2006.01) An energy analyzer for a charged-particle spectrometer may HOIJ 49148(cid:9) (2006.01) include a top deflection plate and a bottom deflection plate. HOIJ47100(cid:9) (2006.01) The top and bottom deflection plates may be non-symmetric HOIJ 40104(cid:9) (2006.01) and configured to generate an inhomogeneous electrostatic (52) U.S. Cl. field when a voltage is applied to one of the top or bottom CPC HOIJ49/22 (2013.01); HOIJ49/48 (2013.01) deflection plates. In some instances, the top and bottom (58) Field of Classification Search deflection plates may be L-shaped deflection plates. USPC ......... 250/281-283, 292, 294, 296, 299, 305, 250/396 R, 492.3, 526 See application file for complete search history. 20 Claims, 6 Drawing Sheets 100 U.S. Patent (cid:9) Jan. 26, 2016 (cid:9) Sheet 1 of 6 (cid:9) US 9,245,726 B1 CIA U.S. Patent (cid:9) Jan. 26 2016 (cid:9) Sheet 2 of 6 (cid:9) US 9 245,726 B1 , , N c~ rd'A (cid:9) ---- It N rq U.S. Patent (cid:9) Jan. 26, 2016 (cid:9) Sheet 3 of 6 (cid:9) US 9,245,726 B1 c~ m C'7 w i N rq U.S. Patent (cid:9) Jan. 26,2016 (cid:9) Sheet 4 of 6 (cid:9) US 9,245,726 BI 13~ FIG. 4 500 . .................................. 'ran-smissilan Function vs Exit Slit S&O Entrance Slit Size is s w 0.1 i 510 520~ (cid:9) . (cid:9) . (cid:9) . . ...... FIG. 5 U.S. Patent (cid:9) (cid:9) Jan. 26, 2016 (cid:9) Sheet 5 of 6 US 9,245,726 B1 600 610 FIG. 7 U.S. Patent (cid:9) Jan. 26, 2016 (cid:9) Sheet 6 of 6 (cid:9) US 9,245,726 B1 800 810 820 Ir I. US 9,245,726 B1 2 CONTROLLING CHARGED PARTICLES deflection plate and the second deflection plate are not sym- WITH INHOMOGENEOUS ELECTROSTATIC metric, and the first deflection plate and the second deflection FIELDS plate generate an inhomogeneous electrostatic field between the first deflection plate and the second deflection plate when ORIGIN 5 a voltage is applied to one of the first deflection plate or the second deflection plate. Another implementation relates to a charged-particle spec- The invention described herein was made by an employee trometer that includes a detector and an energy analyzer. The of the United States Government, and may be manufactured energy analyzer includes a first deflection plate and a second and used by or for the Government for governmental pur- deflection plate. The first deflection plate and the second poses without the payment of any royalties thereon or there- 10 deflection plate are not symmetric, and the first deflection for. plate and the second deflection plate generate an inhomoge- neous electrostatic field between the first deflection plate and FIELD the second deflection plate when a voltage is applied to one of the first deflection plate or the second deflection plate. The present disclosure relates to an apparatus for control- 15 Yet a further implementation relates to an energy analyzer ling charged particles, such as ion and/or electron beams and, that includes a first deflector and a second deflector. The first more particularly, to an energy analyzer for controlling deflector and the second deflector are not symmetric, and the charged particles using asymmetric inhomogeneous fields. first deflector and the second deflector generate an inhomo- geneous electrostatic field between the first deflector and the BACKGROUND 20 second deflector when a voltage is applied to one of the first deflector or the deflector. Charged-particle spectrometers may be designed to mea- sure energy and angular distributions of ions and electrons as BRIEF DESCRIPTION OF THE DRAWINGS well as ionic mass. The charged-particle spectrometers may utilize energy analyzers to limit the energy bandwidth of 25 (cid:9) The details of one or more implementations are set forth in charged-particles that a detector of the charged-particle spec- the accompanying drawings and the description below. Other trometer detects. Such energy analyzers may include a paral- features, aspects, and advantages of the disclosure will lel plate analyzer or a small deflection energy analyzer. become apparent from the description, the drawings, and the claims, in which: SUMMARY 30 (cid:9) FIG.1 is a diagram of an implementation of a parallel plate analyzer having a homogeneous electrostatic field and depict- Implementations described herein relate to energy analyz- ing trajectories of several charged particles from an entrance ers for controlling charged particles, such as ions and/or elec- aperture; tron beams using asymmetric inhomogeneous electrostatic FIG. 2 is a diagram of an implementation of an energy fields. The energy analyzer includes a first deflection plate 35 analyzer having a first deflection plate and a second deflection and a second deflection plate with a voltage being applied to plate generating an inhomogeneous electrostatic field and one of the first deflection plate or the second deflection plate. depicting trajectories of several charged particles from an The deflection plates may be L-shaped deflection plates such entrance aperture; that an inhomogeneous electrostatic field is generated FIG. 3 is a diagram of an implementation of an energy between the plates of the energy analyzer. The energy ana- 40 analyzer generating an inhomogeneous electrostatic field and lyzer also includes an opening aperture through which depicting trajectories of several charged particles from a first charged particles, such as ions and/or electron beams, may be entrance aperture and a second aperture at different energies; received within the energy analyzer. The particles entering FIG. 4 is a graphical diagram depicting the position of a near the top of the opening aperture encounter a stronger disk of least confusion relative to an entrance aperture posi- electrostatic field than the particles entering lower in the 45 tion for varying aspect ratio energy analyzers; opening aperture. Thus, the particles near the top of the open- FIG. 5 is a graphical diagram depicting a normalized trans- ing aperture are deflected by a greater amount than the lower mission function relative to varying exit aperture sizes; particles due to the inhomogeneous electrostatic field. Simi- FIG. 6 is a graphical diagram depicting the deflection of larly, the particles near the bottom of the opening aperture charged particles relative to an angle of incidence for varying encounter a lesser electrostatic field than the particles enter- 50 aspect ratio energy analyzers; ing higher in the opening aperture. Thus, the particles near the FIG. 7 is a graphical diagram depicting a minimum posi- bottom of the opening aperture are deflected by a lesser tion along an exit plane for a charged particle and a derivative amount than the higher particles due to the inhomogeneous of the dispersion function as a function of incident kinetic electrostatic field. Because of the varying amounts of deflec- energy; and tion of the particles resulting from the inhomogeneous elec- 55 (cid:9) FIG. 8 is a block diagram for a charged-particle spectrom- trostatic field, the particles can be converged via demagnifi- eter having multiple energy analyzers and a detector. cation as the particles travel through the energy analyzer, It will be recognized that some or all of the figures are thereby permitting a smaller exit aperture to be utilized. Such schematic representations for purposes of illustration. The demagnification may lead to a large increase in energy reso- figures are provided for the purpose of illustrating one or lution that is offset only by a lessening of focus in an angle a 60 more embodiments with the explicit understanding that they in the energy dispersion plane. The amount of energy resolu- will not be used to limit the scope or the meaning of the tion and the desirable cone of acceptance, defined by the claims. angle a, can be balanced to achieve a desired energy resolu- tion together with a desirable cone of acceptance and aperture DETAILED DESCRIPTION size product. 65 One implementation relates to an energy analyzer having a Following below are more detailed descriptions of various first deflection plate and a second deflection plate. The first concepts related to and implementations of, methods, appa- US 9,245,726 B1 3 4 ratuses, and systems for energy analyzers for charged-particle this plane at an angle, a, with respect to the spectrometer axis. spectrometers having inhomogeneous fields. The various Thus, for a given the plate voltage V and the geometry of the concepts introduced above and discussed in greater detail energy analyzer, the ion or electron deflection is a function of below may be implemented in any of numerous ways as the ion's or electron's kinetic energy E and angle of incidence a described concepts are not limited to any particular manner of 5 and may be written as the function y(E; a). implementation. Examples of specific implementations and If the energy analyzer operates with an exit aperture at an applications are provided primarily for illustrative purposes. exitplane, the energy may be scanned or selected by adjusting I. Overview the applied voltage V. That is, depending upon the voltage Spectrometers can be used in a variety of situations. For selected, certain energies of ions or electrons will pass instance, in space plasmas, like the ionosphere, the magneto- io through the exit aperture while other ions or electrons enter- sphere, and the solar wind, spectrometers may be used to ing the entrance aperture will not exit the energy analyzer via measure the energy and angular distributions of ions and/or the exit aperture. This is because the applied voltage either electrons. In such instances, the ions and/or electrons may does not deflect the ions or electrons enough for them to exit have kinetic energies as high as 50 to 60 keV to be analyzed. the exit aperture or deflects them more than needed to exit via Such high kinetic energies of the ions and/or electrons may 15 the exit aperture. For any value of V there will be a mean require voltage supplies that exceed 5 kilovolts to perform transmitted energy, Eo, from the ions or electrons that exit via measurements, making voltage breakdown a risk in addition the exit aperture. Also, in order for the ions or electrons to pass to large power consumption. Accordingly, usage of an energy the exit slit at energy Eo, they must enter the energy analyzer analyzer operating with small deflections may reduce the along some mean angle of incidence ao. The deflection varia- voltage needed for such measurements. For instance, a small- 20 tion for the ions or electrons due to changes Aa and AE about deflection energy analyzer (SDEA) for a spectrometer can these mean values can be defined as: introduce small deflections to the particles to reduce the elec- trical power needed, such as measuring 60 keV energies with using 3 kilovolts of power. However, such SDEAs have used parallel plate analyzers, which do not focus the particles. 25 Ay= ace) Ace+(aE) DE=S(Eo)Da+d(ao)DE Eo (cid:9) ~ 0 Accordingly, it may be useful to have an SDEA that can focus the particles to obtain better performance in energy resolu- tion, aperture area, and field of view. where the first coefficient g(E0)=(3y/3oL) Eo is the slope of the Such lack of focusing of particles may be eliminated deflection function for fixed energy. The second coefficient through the use of an inhomogeneous electrostatic field for 30 d(a0)=(3y/3E)a0, which is the dispersion of the energy ana- the SDEA in the space between metallic deflection plates. lyzer, provides a measure of how well the energy analyzer The inhomogeneous electrostatic field may be used to control separates different energies. In an application, Ay may be ion and/or electron beam size in conjunction with aperture attempted to be kept as small as possible. However, it may size to obtain improved performance in energy resolution- also be desirable to have a large Aa to ensure as large a cone aperture area-and field of view. Trajectories of the ions and/or 35 of acceptance for the energy analyzer. Also, a small AE may electrons near the upper part of an entrance aperture experi- be needed to meet energy resolution requirements while, at ence a stronger electrostatic field than those near the lower the same time, large dispersion is usually required to mini- part of the entrance aperture, thereby developing a net con- mize the size of the exit slit. The condition for focusing in a is vergence in the transmitted trajectories. The net effect is a met if g(Eo)O. For small deflection energy analyzers very small magnification m (less than 0.01) of the entrance 40 (SDEA), g(E00);-0, but this disadvantage is offset by the effect aperture at the exit aperture plane. The energy resolution of of the inhomogeneous field inside the SDEA. the energy analyzer is enhanced by the factor I/m, allowing In order to obtain an expression to optimize the energy very large entrance aperture sizes for enhanced sensitivity. resolution in a SDEA, the functional relation is rewritten to The inhomogeneous electrostatic field may be generated give the energy of transmitted ions as Eta, y). In terms of this using non-symmetric deflections plates, such as L-shaped 45 function, the uncertainty in the energy of the transmitted ions deflection plates. The usage of such deflection plates still is permits the geometric advantages of an SDEA, such as the ability to stack multiple SDEAs side by side to increase net sensitivity of an ion or electron spectrometer, but also may DE=(aa) 0a+IyaDy result in reduced spectrometer exit slits for improved photon 50 rejection and reduced voltage breakdown risk. II. Operation of an Implementation of an Energy Analyzer where the angle uncertainty is Aa and the deflection uncer- For an energy analyzer of a charged-particle spectrometer, tainty is Ay. Since the energy analyzer sets up an electric field using a known voltage, V, that is applied to one or more deflection plates or 55 deflectors. Ions or electrons enter the analyzer through an entrance aperture and deflect according to the ion's or elec- ~aa)y —(ayVZ tron's kinetic energy, and the energy is obtained from a mea- surement of the ion or electron deflection. The deflection may be measured by the ion or electron position, y, at the exit plane 60 and withthe deflection function being y=y(E, a), it is possible of the analyzer. That is, the energy of an ion or electron may to express AE as be determined based on the vertical deflection of the ion or electron relative to the deflector plates. Another plane in which the ions or electrons deflect is the dispersion plane. aE (cid:9) ay (cid:9) 1 That is, the ions or electrons may deflect in a horizontal 65 DE=(I57VAY +(aa)E~a~ d(ao) (Ay +B(E)Da) direction relative to the entrance aperture. Ions or electrons enter the spectrometer via the entrance aperture moving along US 9,245,726 B1 5 6 This expression indicates that the dispersion, d, must be as entrance aperture 132, the ions and/or electrons are deceler- large as possible to minimize AE. It also indicates that Ay and ated by the electrostatic potential at the equipotential line g(E,) must be controlled to achieved a desired performance. encountered within the energy analyzer 100. For instance, for III. Implementation of a Parallel Plate Energy Analyzer a voltage of 1.0 applied to the top deflection plate 110, the FIG.1 depicts an implementation of a parallel plate energy 5 three ion trajectories 152, 154, 156 of the bundle 150 in the analyzer 100. The energy analyzer 100 includes a top deflec- low energy bundle, such as those having a kinetic energy of tion plate 110, a bottom deflection plate 120, an entrance plate 1.65 eV, are decelerated to kinetic energies of 0.85, 0.80, and 130 and an exit plate 140. The entrance plate 130 includes an 0.75 eV, respectively, losing approximately less than half of entrance aperture 132 through which ions and/or electrons are the kinetic energy due to the electrostatic field. Similarly the permitted to enter the energy analyzer 100. The top deflection 10 trajectories 162,164,166 of the 5.9 eV bundle 160 are decel- plate 110 has a voltage V applied to it while the bottom erated to 5.1, 5.05, and 5.0 eV, respectively. These energy deflection plate 120 has zero voltage applied to it. The voltage differences in the bundles lead to focusing since the slower V applied to the top deflection plate 120 causes a vertical parabolic trajectories 152, 162 near the top of each bundle homogeneous electrostatic field to be generated between the top deflection plate 120 and the bottom deflection plate 130. 15 150, 160 deflect more than the trajectories 156, 166 at the Because of the electrostatic field, a parallel bundle 150,160 of bottom. The effect is more noticeable in the low energy ions and/or electrons having trajectories with finite heights bundle 150 and less so in the high energy bundle 160 because experience focusing due to the difference in kinetic energy of the relative difference in kinetic energy relative to the retardation between the upper 152 and lower 156 parts of the voltage applied to the top deflection plate 110. bundle 150 as they enter the energy analyzer 100. That is, as 20 (cid:9) The focus of the 1.65 eV trajectories 152, 154, 156 illus- ions and/or electrons enter the energy analyzer 100 via the trates the importance of early energy control to use the largest entrance plate 110, the ions and/or electrons near the top of part of the trajectory to achieve focus. In addition, the energy the entrance aperture 132 encounter a higher potential of the analyzer 100 results in a demagnification, m, to the bundle electrostatic field than the ions and/or electrons near the bot- 150 from the entrance aperture 132. That is, if the entrance tom of the entrance aperture 132. Therefore, initially parallel 25 aperture 132 has size of 0.1 D, then the bundle 150 is focused ion and/or electron trajectories converge due to differential to a smaller spot where the three trajectories 152, 154, 156 deceleration of ions and/or electrons between the trajectories converge toward a single point. However, due to the lower near the top of the entrance aperture 132 and the ions and/or energy of the 1.65 eV trajectories 152, 154, 156, the bundle electrons near the bottom of the entrance aperture 132. In 150 encounters the bottom deflection plate 120 before the some implementations, the deflection of the ions and/or elec- 30 convergence. In contrast, the 5.9 eV trajectories 162,164,166 trons via the energy analyzer 100 uses only small deflections exit the energy analyzer 100 in between the top and bottom of ion and/or electron trajectories. A small deflection may be deflection plates 110, 120 at an exit aperture 142 of the exit one in which the trajectory angle at the exit plate 140 is less plate 140. A detector may be positioned behind the exit plate than 45°. 140 to detect the particles that exit via the exit aperture 142 FIG. 1 shows two parallel bundles 150, 160 entering the 35 after the small angular deflection induced by the energy ana- energy analyzer 100 via the entrance aperture 132 horizon- lyzer 100. tally from the left. The three trajectories 152, 154, 156, 162, In some implementations, a plate factor, P, can be defined 164, 166 in each bundle 150, 160 represent the multitude of as the kinetic energy of the detected particles divided by the trajectories that would fill the entrance aperture 132. In one required voltage, V, to deflect the ions and/or electrons out of bundle 150, the ions or electrons enter with a lower kinetic 40 the exit aperture 142. For instance, the analysis of the ions energy, such as 1.65 eV, and the other bundle 160 of ions or and/or electrons of the bundle 160 of FIG. 1 require a plate electrons may enter with a higher kinetic energy, such as 5.9 voltage of only 1.0 volts and thus the energy analyzer 100 has eV. The downward electrostatic field between the top deflec- a plate factor, P, of 5.9. For ions and/or electrons having tion plate 110 and the bottom deflection plate 120 deflect the higher kinetic energy, such as 50,000 eV, an applied voltage ions or electrons in a downward direction toward the bottom 45 of about 8,500 volts would be required to be applied to the top deflection plate 120. In an implementation, the voltage poten- deflection plate 110 to analyze the ions and/or electrons. tial of the top deflection plate 110 is +1 volt and the voltage For the small deflection energy analyzer 100 of FIG. 1 potential of the bottom deflection plate 120 is 0 volts with the having the exit aperture 142 on the exit plate 140, it is possible plates 110, 120 separated by distance D and the horizontal to estimate the energy resolution as AE/E=sl((2f--I)D), under distance to the exit plate 140 and exit aperture 142 from the 50 the assumption that the exit aperture 142 has the same height entrance plate 130 is L. The electrostatic field formed by the as the entrance aperture 132. For instance, for an entrance voltage applied to the top deflection plate 110 and bottom aperture 132 having a height dimension of s-0.1 D and a deflection plate 120 is homogeneous, points downward, and position of f-0.85, the energy resolution for the exit aperture can represented by nine equidistant equipotential straight 142 is AE/E-0.143. While this is a good resolution for such a lines between the top deflection plate 110 and bottom deflec- 55 large exit aperture 142, an improvement to the energy reso- tion plate 120. The representations of the equipotential lines lution may be obtained through the use of an inhomogeneous can vary by differing in steps based on the voltage applied to electrostatic field. the top deflection plate 110 and the bottom deflection plate The deflection function of the ideal parallel plate energy 120. For instance, for a 1.0 voltage applied to the top deflec- analyzer 100 may be obtained from the parabolic trajectories tion plate 110, the equipotential straight lines may be lines 60 that occur in the uniform electrostatic field. The deflection representative of 0.1 voltage changes from 1.0 at the top function of the trajectories, in D units is: deflection plate 110 to 0 at the bottom deflection plate 120. The entrance aperture 132 is has a height, s, and is centered at a distance, IF), above the bottom plate, where f is less than 1.0. L (cid:9) 1 L 2qV 1 That is, f is representative of the percentage distance of the 65 (cid:9) Y(E, a) _ D tan(a) — 2(15) E cos2(a) entire height, D, of the entrance plate 110. In the implemen- tation shown in FIG. 1, s=0. I D and f-0.85. Upon entering the