. . ' .' -..,.. ; . - - 1", / • .- • ' a.'- •• ' . • ~...... , ',. . : = : ' . r.;.I\'!;o/\ , . . . ~ " f, " ~ ~ • . ' .. . . Next Geri·e'ratibri)(~~ay·Optics (NGXO) '. - "" !pul. ........ ,. ,,_ _ , • • ' .' • • _ . • • r Reflective Coating for Lightweight Segmented X-ray Optics Kai-Wing Chana, William Zhangb, David WindtC, Melinda Hongd, Timo Sahab; Ryan McCleliandd, Marton Sharped, Vivek Dwivedib 'Ctlnetr far Research and Exploration in Space Sc:ierwe ,nc! TechnolosY; and Unlver,1ty of Maryland, Balt1more COooty, Baltimore, MO, USA 'NASA,IGoddl:'d Spac. Ri&trt Center, G~nbelt, MO USA <Ref\ectlyt X'ravOptiC$ uc. New' Yottc. NY USA "Sdngi!\" Gn.ffI!M.n Ted'IrIoIogies, Int." Greenbelt, MD USA \. _- X-Ray Optics for Astronomy Coatfng and Angular Resolution .. , N~!II.n ••~ tion ••a y optIcl for U!ronomy will • Oooet coltlne !!\.lItter st.uctu,dy1 kx_second •• CfHloiqpmuW p~a.c Itq. mthfi ntIlf lstthOeIcIMIil, il_olan:hl oitsww tlh l<ie0s1h h1to; of(Wp~ ItSekIu'. utI"w_) • !C.h.o~irne ls"It\.eI odI nmt ouIpII'ft~oia fG , yPeas p. Onmfllm)11 hleh ......... to~on ~. • &amp": 51& of~ 111JT1 from 3 GpIt, 20 nm 11m on 0.4 mm ".", lubotrllte of 200mm 10IlI ~ _~ . I .~. .. 'r~·~.· Coating with Magnetron Sputtering Film ,t. ....... are hleh: - 11': -4 GPi (comprl. ......) - cr: -HiPa (remiloj Mirror = Substrate + Reflective Coating Su«essIveIy depo&/lIn& thicbt Ii_on m~Pf~sl'lelyWU<MmItI.iIII • I'rKIJt, thin, la'lf!, alas:s subltrltft I. f_ .re-seconds) ... now dtvRioped and '£11>Iutlo:! lalmprovlnl curv.ture • Lowrt"~I, hi.n-lcoatin, is nledtd for .-'ay I1!flertion for E < 10 keY. Multi-laye, lor huder II-BV- o Requl:e$lbout 20 nm of sinK I. 1.. .... fUm of hilh-Zmltll II"" I., Ptl Two approaches to eliminlte film stress induced distortion: - ,,~----~~ 1. LoWStresl IT/Crbi-layer r: ~~ i .. ~ 2. Cdeopnofsoirtmioanl front and back side . ,... ... ...: • • ~ ,,: ~ •:I- •lit # " ',,.- --v--.."~. --a---rl. " 1.. . 11 Low stresslr/Cr bi-Iayer deposition Conformal Front-side and Backside deposition ,. . c.o.Tln~.lnduced dirt<>rtic>n of mirror may be b~lancltd byoo.llnl both front slde.nd tIMo batk llid. of ! • T.k1! Itd .... nta,e ofoomp. ....1 ve I,.nd th.mI ..... wn':lo! Cr I. Require. malthin,(prefer.bly unlfo.m) thickness and st. ... distribution OVer mi'l'<Ir'. surt.ees o Cwoilm pbriondeudc ler /HCIr' <bll-IJt. av.-.. dAeimp osition Back ,Id, cOII:I!!d mlrrors ....1 10 th ••m ~11y u.efu;l EE o c.lbrltiOllofCrfilmwithvulabJe !hidneu r£duceo tho .. fIe<v... uress of _/Cr 111m to witNns o.t GP. - ! \ I J. , .I.C.. . -..i.i.i. '" .. _,..--- , .J I,' .1 ,', f :::! • Direct deposition of Il/Cr bt-laye'filrnooM. .... -:'.~.- mirrors • 1 dlfh!fflI1 su-...Inotls: ,. +0..2. -4.4, -D.t GP. FtotIIW hdI"'~wItII eo.."...... F.-.... a.c:lCoMl".wita o fUlllIffK.~htsof MqnelmlHpOlttlfm, MOnIIc ....... 1 nepoi/llon (ALD) minors were mNsured rront. ... icII deposition produQs ..., , Th. cast for ALD with intem.rrT).t.r [wlth variation as IIopected - Canto.m.1 <om ... on aU IUrt.cu null le-ns senlratln, • BaeiKld. deposition pmdlle" - Unlfo~m coat cylindrical wavaflontl OOJIIIUIne, limilar ""' th.~ - PoI.nti.lly lower Itres. - FIlm-induced wi , I!UC m.gnitudes do not ....! (.h ~actly, -- OI/11 •• nd tnlooth IIIms Cl.vaI:Llfeti ... noc _lally at middl. alirnutM o I'rUmlneIy results ."IffICOU''1inc p..ro..p otti_llo ...... • Geomltrf~.ofrnirron mounli!d • Curtm/y enpcInc local facilities and (Ilsue with !hid.-. In the COItInc chembo!r thin II. .... I.q.I.Il pment """""" klr fvrther rs~.~r~~n-,7fMCm.C-.-•-. ---. ~ _~~~~'~'~M~~~ _____. =.'='~M~~~ ______. ~'=.'~M=~~ __ ~\:'. :.:.:. ':'":~::~:;:m":':h.:::::;~ FUrther Information References MIn'OtCOllllnc .~.d MetJuIa&y; &I·WlN Cbto-!8MM my III WllMI w. z:t...., It"~ ""Nat1Hlfl"1ion _..,~ hlr!He6OIlI1ion.l':&ht--'lft!• • nd!ow-cost',1'nK. SI'IE 8443-.21, MIrTonT~....,··m·wlber!r.".y 19!! (lOU). AMUirlrfoIrI 'fMI.:.rut.onIdo tBvo: nJ'dmi"o.:T M·5iaEbb''!"lnl''!"! ,pC,RbY !o. .. Fev 1I3I1I RMyiacnh .Se. lM Bidsllceatbhn, edt,.lfl~ t0I ~P f'Dlc:H:hie& .Inia.n;ndm aennatI aynlidl opfl rmmoadnl".l,l,a-fmoro .uqnmtine.n oteftdh ,!Ipa.Rn d• .bf,,yh lowplltgbh't, .P"rYoc. .Se&PIEm 8e4n4tl3",- 1P4l'<4lo, :1. S2P0iEn ). fMAjWodul£,; Ilvi!!n.S.Mspdl'o4fOo'" lOY 8443.145, (2012).