I C Electrical Engineering N H I E O W U S D K H I A R Y FUNDAMENTAL TECHNOLOGY APPLICATIONS AND “The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background.” —Boris Stoeber, The University of British Columbia, Vancouver, Canada The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerom- eters and gyroscopes used in automotive safety to high-precision on-chip AF integrated oscillators for reference generation and mobile phones. MEMS: NU D FUNDAMENTAL TECHNOLOGY Fundamental Technology and Applications brings together groundbreak- N ing research in MEMS technology and explores an eclectic set of novel AD applications enabled by the technology. The book features contributions PA AND APPLICATIONS PM by top experts from industry and academia from around the world. LE IN The contributors explain the theoretical background and supply practical C T A insights on applying the technology. From the historical evolution of nano- A T microsystems to recent trends, they examine alternative materials, gyro- L I scopes, ambient energy harvesting, advanced interconnects, resonators, O T micro hot-plate devices, wearable sensor assemblies, wireless microactua- N E S tors, and much more. Throughout, the contributors identify challenges and C pose questions that need to be resolved, paving the way for new applications. H Offering a wide view of the MEMS landscape, this is an invaluable resource N O for anyone working to develop and commercialize MEMS applications. L O G Y K15054 Edited by V I K A S C H O U D H A RY K R Z Y S Z T O F I N I E W S K I FUNDAMENTAL TECHNOLOGY APPLICATIONS AND Devices, Circuits, and Systems Series Editor Krzysztof Iniewski CMOS Emerging Technologies Inc., Vancouver, British Columbia, Canada PUBLISHED TITLES: Atomic Nanoscale Technology in the Nuclear Industry Taeho Woo Biological and Medical Sensor Technologies Krzysztof Iniewski Electrical Solitons: Theory, Design, and Applications David Ricketts and Donhee Ham Electronics for Radiation Detection Krzysztof Iniewski Graphene, Carbon Nanotubes, and Nanostuctures: Techniques and Applications James E. Morris and Krzysztof Iniewski High-Speed Photonics Interconnects Lukas Chrostowski and Krzysztof Iniewski Integrated Microsystems: Electronics, Photonics, and Biotechnology Krzysztof Iniewski Internet Networks: Wired, Wireless, and Optical Technologies Krzysztof Iniewski Low Power Emerging Wireless Technologies Lukas Chrostowski and Krzysztof Iniewski MEMS: Fundamental Technology and Applications Vikas Choudhary and Krzysztof Iniewski Nano-Semiconductors: Devices and Technology Krzysztof Iniewski Nanoelectronic Device Applications Handbook James E. Morris and Krzysztof Iniewski Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies Krzysztof Iniewski Radiation Effects in Semiconductors Krzysztof Iniewski Semiconductor Radiation Detection Systems Krzysztof Iniewski Smart Sensors for Industrial Applications Krzysztof Iniewski Telecommunication Networks Eugenio Iannone FORTHCOMING TITLES: Novel Advances in Microsystems Technologies and Their Applications Laurent A. Francis and Krzysztof Iniewski Nanoelectronics: Devices, Circuits, and Systems Nikos Konofaos Building Sensor Networks: From Design to Applications Ioanis Nikolaidis and Krzysztof Iniewski Embedded and Networking Systems: Design, Software, and Implementation Gul N. Khan and Krzysztof Iniewski Medical Imaging: Technology and Applications Troy Farncombe and Krzysztof Iniewski Nanoscale Semiconductor Memories: Technology and Applications Santosh K. Kurinec and Krzysztof Iniewski Nanoplasmonics: Advanced Device Applications James W. M. Chon and Krzysztof Iniewski MIMO Power Line Communications: Narrow and Broadband Standards, EMC, and Advanced Processing Lars Torsten Berger, Andreas Schwager, Pascal Pagani, and Daniel Schneider Energy Harvesting with Functional Materials and Microsystems Madhu Bhaskaran, Sharath Sriram, and Krzysztof Iniewski Mobile Point-of-Care Monitors and Diagnostic Device Design Walter Karlen and Krzysztof Iniewski Integrated Power Devices and TCAD Simulation Yue Fu, Zhanming Li, Wai Tung Ng, and Johnny K.O. Sin CMOS: Front-End Electronics for Radiation Sensors Angelo Rivetti Radio Frequency Integrated Circuit Design Sebastian Magierowski FUNDAMENTAL TECHNOLOGY APPLICATIONS AND Edited by VIKAS CHOUDHARY KRZYSZTOF INIEWSKI Boca Raton London New York CRC Press is an imprint of the Taylor & Francis Group, an informa business MATLAB® is a trademark of The MathWorks, Inc. and is used with permission. The MathWorks does not warrant the accuracy of the text or exercises in this book. This book’s use or discussion of MATLAB® software or related products does not constitute endorsement or sponsorship by The MathWorks of a particular pedagogical approach or particular use of the MATLAB® software. CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2013 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Version Date: 20130305 International Standard Book Number-13: 978-1-4665-1582-6 (eBook - PDF) This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the valid- ity of all materials or the consequences of their use. The authors and publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission to publish in this form has not been obtained. If any copyright material has not been acknowledged please write and let us know so we may rectify in any future reprint. Except as permitted under U.S. Copyright Law, no part of this book may be reprinted, reproduced, transmitted, or uti- lized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopy- ing, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers. For permission to photocopy or use material electronically from this work, please access www.copyright.com (http:// www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC), 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com Dedicated to Anu, Aryaman, Anushka, and my parents Vikas Choudhary © 2010 Taylor & Francis Group, LLC