MEMS and Microstructures Aerospace in Applications Edited by Robert Osiander M. Ann Garrison Darrin John L. Champion Boca Raton London New York A CRC title, part of the Taylor & Francis imprint, a member of the Taylor & Francis Group, the academic division of T&F Informa plc. © 2006 by Taylor & Francis Group, LLC Published in 2006 by CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2006 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number-10: 0-8247-2637-5 (Hardcover) International Standard Book Number-13: 978-0-8247-2637-9 (Hardcover) Library of Congress Card Number 2005010800 This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. 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For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Osiander, Robert. MEMS and microstructures in aerospace applications / Robert Osiander, M. Ann Garrison Darrin, John Champion. p. cm. ISBN 0-8247-2637-5 1. Aeronautical instruments. 2. Aerospace engineering--Equipment and supplies. 3. Microelectromechanical systems. I. Darrin, M. Ann Garrison. II. Champion, John. III. Title. TL589.O85 2005 629.135--dc22 2005010800 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com Taylor & Francis Group and the CRC Press Web site at is the Academic Division of T&F Informa plc. http://www.crcpress.com © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page iii 1.9.2005 8:59pm Preface MEMS and Microstructures in Aerospace Applications is written from a program- matic requirements perspective. MEMS is an interdisciplinary field requiring knowledge in electronics, micromechanisms, processing, physics, fluidics, pack- aging,andmaterials,justtonameafewoftheskills.Asacorollary,spacemissions requireanevenbroaderrangeofdisciplines.Itisforthisbroadgroupandespecially for the system engineer that this book is written. The material is designed for the systems engineer, flight assurance manager, project lead, technologist, program management, subsystem leads and others, including the scientist searching for new instrumentation capabilities, as a practical guide to MEMS in aerospace applications. The objective of this book is to provide the reader with enough background and specific information to envision and support the insertion of MEMS in future flight missions. In order to nurture the vision of using MEMS in microspacecraft—oreveninspacecraft—wetrytogiveanoverviewofsomeof the applications of MEMS in space to date, as well as the different applications which have been developed so far to support space missions. Most of these applications are at low-technology readiness levels, and the expected next step is to develop space qualified hardware. However, the field is still lacking a heritage database to solicit prescriptive requirements for the next generation of MEMS demonstrations. (Some may argue that that is a benefit.) The second objective of this book is to provide guidelines and materials for the end user to draw upon to integrate andqualify MEMS devices and instruments for future space missions. © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page v 1.9.2005 8:59pm Editors Robert Osiander received his Ph.D. at the Technical University in Munich, Germany, in 1991. Since then he has worked at JHU/APL’s Research and Tech- nology Development Center, where he became assistant supervisor for the sensor science group in 2003, and a member of the principal professional staff in 2004. Dr. Osiander’s current research interests include microelectromechanical systems (MEMS), nanotechnology, and Terahertz imaging and technology for applications in sensors, communications, thermal control, and space. He is the principal inves- tigator on ‘‘MEMS Shutters for Spacecraft Thermal Control,’’ which is one of NASA’s New Millenium Space Technology Missions, to be launched in 2005. Dr. Osiander has also developed a research program to develop carbon nanotube (CNT)-based thermal control coatings. M. Ann Garrison Darrin is a member of the principal professional staff and is a program manager for the Research and Technology Development Center at The Johns Hopkins University Applied Physics Laboratory. She has over 20 years experience in both government (NASA, DoD) and private industry in particular with technology development, application, transfer, and insertion into space flight missions. She holds an M.S. in technology management and has authored several papers on technology insertion along with coauthoring several patents. Ms. Darrin was the division chief at NASA’s GSFC for Electronic Parts, Packaging and Material Sciences from 1993 to 1998. She has extensive background in aerospace engineering management, microelectronics and semiconductors, packaging, and advanced miniaturization. Ms. Darrin co-chairs the MEMS Alliance of the Mid Atlantic. JohnL.ChampionisaprogrammanageratTheJohnsHopkinsUniversityApplied Physics Laboratory (JHU/APL) in the Research and Technology Development Center (RTDC). He received his Ph.D. from The Johns Hopkins University, De- partment of Materials Science, in 1996. Dr. Champion’s research interests include design, fabrication, and characterization of MEMS systems for defense and space applications. He was involved in the development of the JHU/APL Lorentz force xylophone bar magnetometer and the design of the MEMS-based variable reflect- ivityconceptforspacecraftthermalcontrol.ThiscollaborationwithNASA–GSFC wasselectedasademonstrationtechniqueononeofthethreenanosatellitesforthe New Millennium Program’s Space Technology-5 (ST5) mission. Dr. Champion’s graduate research investigated thermally induced deformations in layered struc- tures. He haspublished and presented numerous papers inhis field. © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page vii 1.9.2005 8:59pm Contributors JamesJ. Allen R.David Gerke SandiaNational Laboratory Jet Propulsion Laboratory Albuquerque, New Mexico Pasadena,California Bradley G.Boone Brian Jamieson The Johns Hopkins UniversityApplied NASA Goddard Space Flight Center PhysicsLaboratory Greenbelt, Maryland Laurel,Maryland RobertOsiander Stephen P. Buchner The Johns Hopkins UniversityApplied NASA Goddard Space Flight Center PhysicsLaboratory Greenbelt, Maryland Laurel,Maryland Philip T. Chen RobertPowers NASA Goddard Space Flight Center Jet Propulsion Laboratory Greenbelt, Maryland Pasadena,California M. AnnGarrison Darrin Keith J. Rebello The Johns Hopkins UniversityApplied The Johns Hopkins UniversityApplied PhysicsLaboratory PhysicsLaboratory Laurel,Maryland Laurel,Maryland Cornelius J. Dennehy NASA Goddard Space Flight Center Jochen Schein Greenbelt, Maryland Lawrence Livermore National Laboratory Dawnielle Farrar Livermore, California The Johns Hopkins UniversityApplied PhysicsLaboratory Theodore D.Swanson Laurel,Maryland NASA Goddard Space Flight Center Greenbelt, Maryland Samara L. Firebaugh United States Naval Academy Danielle M.Wesolek Annapolis,Maryland The Johns Hopkins UniversityApplied PhysicsLaboratory Thomas George Laurel,Maryland Jet Propulsion Laboratory Pasadena,California © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page ix 1.9.2005 8:59pm Acknowledgments Without technology champions, the hurdles of uncertainty and risk vie with cer- tainty and programmatic pressure to prevent new technology insertions in space- craft. A key role for these champions is to prevent obstacles from bringing development and innovation toa sheer halt. The editors have been fortunate to work with the New Millennium Program (NMP) Team for Space Technology 5 (ST5) at the NASA Goddard Space Flight Center (GSFC). In particular, Ted Swanson, as technology champion, and Donya Douglas, as technology leader, created an environment that balanced certainty, uncertainties, risks and pressures for ST5, micron-scale machines open and close tovarytheemissivityonthesurfaceofamicrosatelliteradiator.These‘‘VARI-E’’ microelectromechanical systems (MEMS) are a result of collaboration between NASA, Sandia National Laboratories, and The Johns Hopkins University Applied Physics Laboratory (JHU/APL). Special thanks also to other NASA ‘‘tech cham- pions’’ Matt Moran (Glenn Research Center) and Fred Herrera (GSFC) to name a few!Workingwithtechnologychampionsinspiredustorealizethevastpotentialof ‘‘small’’ inspace applications. AdebtofgratitudegoestoourmanagementteamDickBenson,BillD’Amico, JohnSommerer,andJoeSuterandtotheJohnsHopkinsUniversityAppliedPhysics LaboratoryforitssupportthroughtheJanneyProgram.Ourthanksareduetoallthe authors and reviewers, especially Phil Chen, NASA, in residency for a year at the laboratory.Thanks for sharing inthe pain. There is one person for whom we are indentured servants for life, Patricia M. Prettyman, whose skills and abilities were and are invaluable. © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page xi 1.9.2005 8:59pm Contents Chapter1 Overview ofMicroelectromechanicalSystems and Microstructures inAerospace Applications.........................................................................................1 Robert Osiander andM. Ann GarrisonDarrin Chapter2 Vision for Microtechnology Space Missions..........................................................13 Cornelius J.Dennehy Chapter3 MEMS Fabrication..................................................................................................35 James J.Allen Chapter4 Impact of Space EnvironmentalFactors onMicrotechnologies............................67 M.AnnGarrison Darrin Chapter5 Space Radiation Effects and Microelectromechanical Systems.............................83 Stephen P. Buchner Chapter6 Microtechnologies for Space Systems..................................................................111 ThomasGeorgeand Robert Powers Chapter7 Microtechnologies for Science InstrumentationApplications..............................127 Brian Jamieson and Robert Osiander Chapter8 Microelectromechanical Systems for SpacecraftCommunications.....................149 BradleyGilbertBoone andSamara Firebaugh Chapter9 Microsystems inSpacecraft Thermal Control......................................................183 Theodore D.Swanson and Philip T. Chen © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_prelims FinalProof page xii 1.9.2005 8:59pm Chapter 10 Microsystems inSpacecraft Guidance, Navigation, andControl.........................203 Cornelius J. Dennehy and Robert Osiander Chapter 11 Micropropulsion Technologies..............................................................................229 Jochen Schein Chapter 12 MEMS Packaging for Space Applications............................................................269 R. David Gerkeand Danielle M. Wesolek Chapter 13 Handling and ContaminationControlConsiderations for Critical Space Applications.............................................................................289 Philip T. Chen and R. David Gerke Chapter 14 Material Selection for Applications of MEMS.....................................................309 Keith J.Rebello Chapter 15 Reliability Practices for Design and Application of Space-Based MEMS..........327 Robert Osianderand M. Ann Garrison Darrin Chapter 16 Assurance Practices for Microelectromechanical Systems andMicrostructures inAerospace.........................................................................347 M.Ann Garrison Darrin and Dawnielle Farrar © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_c001 FinalProof page 1 1.9.2005 11:41am 1 Overview of Microelectromechanical Systems and Microstructures in Aerospace Applications Robert Osiander and M. Ann Garrison Darrin CONTENTS 1.1 Introduction......................................................................................................1 1.2 Implications ofMEMS and Microsystems inAerospace...............................2 1.3 MEMS inSpace...............................................................................................4 1.3.1 Digital Micro-Propulsion Program STS-93.........................................4 1.3.2 Picosatellite Mission.............................................................................5 1.3.3 ScorpiusSub-OrbitalDemonstration...................................................5 1.3.4 MEPSI...................................................................................................5 1.3.5 Missiles and Munitions — Inertial Measurement Units......................6 1.3.6 OPAL, SAPPHIRE,and Emerald........................................................6 1.3.7 International Examples.........................................................................6 1.4 Microelectromechanical Systems andMicrostructures inAerospace Applications...............................................................................6 1.4.1 An Understanding ofMEMS and the MEMS Vision.........................7 1.4.2 MEMSin Space Systems andInstrumentation....................................8 1.4.3 MEMSin Satellite Subsystems............................................................9 1.4.4 Technical InsertionofMEMS in Aerospace Applications................10 1.5 Conclusion.....................................................................................................11 References...............................................................................................................12 Themachinedoesnotisolatemanfromthegreatproblemsofnaturebutplungeshim moredeeplyintothem. Saint-Exupe´ry,Wind,Sand,andStars,1939 1.1 INTRODUCTION To piece togethera bookon microelectromechanicalsystems(MEMS)and micro- structures for aerospace applications is perhaps foolhardy as we are still in the 1 © 2006 by Taylor & Francis Group, LLC Osiander/MEMSandmicrostructuresinAerospaceapplications DK3181_c001 FinalProof page 2 1.9.2005 11:41am 2 MEMSandMicrostructuresinAerospaceApplications infancy of micron-scale machines in space flight. To move from the infancy of a technologytomaturitytakesyearsandmanyawkwardperiods.Forexample,wedid nottrulyattaintheageofflightuntilthelate1940s,whenflyingbecameaccessibleto manyindividuals.Theinsertionoradoptionperiod,fromtheinfancyofflight,began withtheWrightBrothersin1903andtookmorethan50yearsuntilitwaspopularized. Similarly,thebirthofMEMSbeganin1969witharesonantgatefield-effecttransistor designedbyWestinghouse.Duringthenextdecade,manufacturersbeganusingbulk- etchedsiliconwaferstoproducepressuresensors,andexperimentationcontinuedinto theearly1980stocreatesurface-micromachinedpolysiliconactuatorsthatwereusedin discdriveheads.Bythelate1980s,thepotentialofMEMSdeviceswasembraced,and widespreaddesignandimplementationgrewinthemicroelectronicsandbiomedical industries. In 25 years, MEMS moved from the technical curiosity realm to the commercialpotentialworld.Inthe1990s,theU.S.Governmentandrelevantagencies had large-scale MEMS support and projects underway. The Air Force Office of Scientific Research (AFOSR) was supporting basic research in materials while the DefenseAdvancedResearchProjectsAgency(DARPA)initiateditsfoundryservicein 1993.Additionally,theNationalInstituteofStandardsandTechnology(NIST) began supportingcommercialfoundries. Inthelate1990s,earlydemonstrationsofMEMSinaerospaceapplicationsbegan tobepresented.InsertionshaveincludedMightySat1,ShuttleOrbiterSTS-93,the 1 DARPA-ledconsortiumoftheflightofOPAL,andthesuborbitalrideonScorpius (Microcosm).Theseearlyentrypointswillbediscussedasafoundationforthenext generationofMEMSinspace.Severalearlyapplicationsemergedintheacademic andamateursatellitefields.Inlessthana10-yeartimeframe,MEMSadvancedtoa full, regimented, space-grade technology. Quick insertion into aerospace systems fromthispointcanbepredictedtobecomewidespreadinthenext10years. ThisbookispresentedtoassistinusheringinthenextgenerationofMEMSthat willbefullyintegratedintocriticalspace-flightsystems.Itisdesignedtobeusedby the systems engineer presented with the ever-daunting task of assuring the mitiga- tionof risk when inserting new technologies into space systems. ToreturntothequoteabovefromSaintExupe´ry,theapplicationofMEMSand microsystems to space travel takes us deeper into the realm of interactions with environments.Threeenvironmentstobespecific:onEarth,atlaunch,andinorbit. Understandingtheimpactsoftheseenvironmentsonmicron-scaledevicesisessential, andthistopiciscoveredatlengthinordertopresentaspringboardforfuturegener- ations. 1.2 IMPLICATIONS OF MEMS AND MICROSYSTEMS IN AEROSPACE The starting point for microengineering could be set, depending on the standards, sometime in the 15th century, when the first watchmakers started to make pocket watches, devices micromachined after their macroscopic counterparts. With the introduction of quartz for timekeeping purposes around 1960, watches became the first trueMEMSdevice. © 2006 by Taylor & Francis Group, LLC