OOPPEERRAATTIINNGG IINNSSTTRRUUCCTTIIOONNSS EENN TTrraannssllaattiioonn ooff tthhee oorriiggiinnaall iinnssttrruuccttiioonnss PPAASSCCAALL SSEERRIIEESS RRoottaarryy vvaannee ppuummppss 55 ttoo 2211 mm33//hh Welcome Rotary vane pumps Dear customer, You have just bought a Pfeiffer Vacuum rotary vane pump. We would like to thank you and are proud to rank you among our customers. This product benefited from experience acquired over many years by Pfeiffer Vacuum SAS in the design of rotary vane pumps. We suggest that you read these operating instructions, particularly the chapter on installation and operation, before starting the use of this pump so that you can obtain optimum levels of APPLICATIONS: performance and complete satisfaction from this equipment. • RESEARCH AND DEVELOPMENT Physics and chemistry laboratories, etc... • INDUSTRY The performance and Foodstuffs (freeze-drying), Pharmaceuticals, Electronic tube manufacture, operational safety of this Metallurgy, Drying systems, Refrigeration systems, Chemical industry, etc... product are guaranteed provided • INSTRUMENTATION it is used normally in the Mass spectrometetry, Centrifuges, Electronic microscopes, Leak detection operating conditions defined in systems, etc... this operating manual. It is the customer’s responsibility • VARIOUS SEMICONDUCTOR PROCESSES to: - train operators to use the product if they do not speak the This product is designed to gererate vacuum by pumping on gases, language the operating manual but no liquids or solids. It is dedicated for running in industrial is written in, environments. - ensure operators know the safe The pumps must not be operated in an area with a risk of explosion. practices to apply when using Consult the nearest support service to study a solution. the product. EN – 1 This product complies with the requirements of European Directives, listed in the Declaration of Conformity which appears on page 47 of this operating manual. Copyright/Intellectual property: The use of Pfeiffer Vacuum products are subject to copyright and intellectual property rights in force in any jurisdiction. All rights reserved, including copying this document in whole or in part without prior written authorization from Pfeiffer Vacuum SAS. Specifications and information are subject to change without notice by Pfeiffer Vacuum SAS. Symbol / Label Description Warning: high temperature hazard Warning: electrical shock hazard Danger: refer to operating instructions ~ AAlltteerrnnaattiinngg ccuurrrreenntt Power ON switch Power OFF switch Earth terminal IN Pump inlet flange OUT Pump exhaust flange Indicates a potentially hazardous situation which, if not avoided, could result in property damage. Indicates a potentially hazardous situation which, if not avoided, could result in moderate or minor injury. It may also be used to alert against unsafe practices. Indicates a potentially hazardous situation which, if not avoided, could result in death or severe injury. Indicates an imminently hazardous situation that, if not avoided, will result in death or severe injury (extreme situations). Before switching on the product, study operating instructions and make sure you follow the safety instructions it gives. You can recognize these by the ‘Caution’, ‘Warning’ and ‘Danger’ symbols. Good practice tips and manufacturer’s recommendations are in a grey box. EN – 2 n Table of contents o i t c u MANUAL P/N: 103275 d EDITION: 11 - October 2015 o r t Translated from original version n I Introduction Presentation of the product range .............................................................. 4 5 to 21 m3/h rotary vane pumps, I, SD, SDI ,C1, C2 Pascal series ............... 5 Operating principle of a rotary vane pump ......................................................6 Oil .............................................................................................................. 8 Technical characteristics .............................................................................. 9 p Pump dimensions ....................................................................................... 11 u - Accessories ................................................................................................. 12 t r a Start-up t S Safety instructions concerning the installation and operation ..................... 15 Recommended oils ..................................................................................... 18 Filling with oil ............................................................................................. 19 Checking the oil level ................................................................................. 20 N Mechanical connections ............................................................................. 21 E Electrical connections ................................................................................. 24 Operation n Preliminary precautions ............................................................................... 29 o Operating temperature ............................................................................... 29 i t a Before starting-up the pump....................................................................... 30 r e Start-up ...................................................................................................... 30 p O Cold start-up .............................................................................................. 30 SDI models ................................................................................................. 31 Pump stop .................................................................................................. 31 To prevent any pumping hazard .....................................................................31 Operation of the gas ballast ...................................................................... 33 Purges for pumping condensable and corrosive gases ................................ 35 Oxygen pumping ........................................................................................ 37 e Recovery of oil (high pressure and cycling) .................................................. 38 c n Maintenance a n Safety instructions for maintenance ............................................................ 39 e t Troubleshooting and corrective actions ....................................................... 40 n i Maintenance frequency .............................................................................. 43 a M Maintenance of the accessories .................................................................. 43 Draining .................................................................................................... 44 Flushing ...................................................................................................... 44 Change of the type of oil ........................................................................... 45 Service ....................................................................................................... 46 Declaration of Conformity ...................................................................... 47 Maintenance instructions ..........................................available on web site EN – 3 Presentation of the product range A wide range Oil seal rotary vane pumps are used in all vacuum technology applications. Specific solutions adapted to They can be used on their own to achieve a maximum vacuum of 0.75 Torr various applications (1 · 10-3 hPa), or in pumping assemblies, e.g. at the exhaust of a diffusion pump or turbomolecular pump. SD Series Standard pumps for several purposes (non-corrosive applications). Manufacture of light bulbs, production of TV tubes, manufacture of electronic tubes, metallurgy, centrifuges, etc. I, SDI Series Pumps designed to meet the requirements of analytical instrumentation and R&D. Mass spectrometer, electronic microscopes, GC/MS, LC/MS, gas analyzers, leak detectors, sterilizers, etc. C1 Series Pumps suitable for pumping corrosive gases. R&D, laboratories, freeze-drying, pumping of solvents, etc. C2 Series Pumps with increased resistance to meet the requirements of the more aggressive processes of the semiconductor industry. Ion implantation, sputtering, etc. Nom. fl. rate m3/h 5 10 15 21 I series 2 stages 2005I 2010I 2015I 2021I 1 stage 1005SD / 1015SD / SD series 2 stages 2005SD 2010SD 2015SD 2021SD SDI series 2 stages 2005SDI / / / C1 series 2 stages 2005C1 2010C1 2015C1 2021C1 C2 series 2 stages / 2010C2 2015C2 2021C2 EN – 4 n 5 to 21 m3/h rotary vane pumps o i t c I, SD, SDI, C1, C2 Pascal series u d o r t n I The 5 to 21 m3/h pump models 8 9 10 11 have the following features: – A direct drive motor, making them very compact. – An electrically insulated fold- 5 away handle is used for easy carrying. – An anti-suckback system ensures the tightness of the pump during accidental or voluntary shutdowns. 4 – The universal three-phase or single- phase motor can be disassembled independently of the rest of the pump, without N the need to drain the oil case. 6 E – On the oil case, a vertical sight glass can be used to inspect the oil level easily when filling the 7 tank and during the operation of 2 3 the pump. – A gas ballast enables the 1 pumping of condensable vapours (except for C2 series). 1. Oil case 7. Frame – A neutral gas purge is used 2. Gas ballast control 8. Inlet end fitting to degas oil and dilute pumped 3. Base 9. Exhaust end fitting gases on C2 series models. 4. Oil level sight glass 10. Fold-away handle – A second inlet port is 5. Filling plugs 11. Electric motor (single-phase or Three-phase) available for instrumentation 6. Draining plug (under oil sight needs (model SDI). glass cover) The inlet and exhaust end fittings are PNEUROP ISO-KF standardized. They are fitted vertically on the pump at delivery but can be positioned on the horizontal openings if required by operating conditions. They can be used to connect many of our accessories (see page 12). The main remplacement parts are interchangeable: This enables easier disassembly- assembly operations and replacement without changing the pump’s performance. Various accessories can be used to adapt the pump to meet the requirements of your application. EN – 5 Operating principle of the rotary vane pump Single-stage This is a volumetric pump, with a functional part composed of: • A hollow cylindrical stator with inlet and exhaust valves. rotary vane pump • A rotor mounted eccentrically inside the stator for pumping. • Two vanes sliding in the rotor, forced against the stator by centrifugal force and springs. The pumping cycle is given below: In. Exh. Inlet As the vane passes in front of the inlet orifice, an increasing space is formed into which the gas from the chamber to be evacuated expands. When the second vane passes, the space is closed. In. Exh. Transfer The gas trapped in the space between the two vanes is transferred to the exhaust orifice as the rotor rotates. In. Exh. Compression The space communicates with the exhaust, which is fitted with a valve: the gas is compressed until the safety valve is opened. In. Exh. Exhaust The gas is expelled into the oil casing when the pressure is sufficient to open the valve. EN – 6 n o i t c u d o r t n I Two-stage To improve the backing pressure and flow rate at a low pressure, two stages are rotary vane pump connected in series. The second is similar to the first both structurally and operationally. The gases pulled in by the first (low pressure) stage are transferred to the second (high pressure) stage and discharged through the high pressure (HP) valve. In. Exh. Low pressure stage High pressure stage N E Applications These rotary vane pumps are the best choice for application requiring an ultimate vacuum as low as 2 · 10-3 hPa (1.5 · 10-3 Torr). Note: when operating a two stage vane pump continously, greater than half an hour - above 1 hPa (1.0 Torr), - or with opened gas ballast, the unit should be equipped with an oil mist eliminator with an oil return system. SDI Series These pumps integrate 2 models in a single product: - they work as a two stage pump when the inlet port is connected, - they work as a single stage pump when they are pumping through the intermediate port. Intermediate port In. Exh. Intermediate port Low pressure stage High pressure stage Applications They are used in applications which require in a meantime a good level of ultimate vacuum and the pumping of a tracer gas. For example, in leak detection, it is necessary to reach low pressure into the analyzer cell by pumping via the pump inlet, and to pump a tracer gas as Helium through the intermediate port. EN – 7 Oil Its function Oil has several important functions in the pump: – It lubricates mechanical components (bearings, seals, rotor, vanes, etc.). – It makes moving parts relatively tight by limiting internal leakage. – It carries away the heat produced by the compressed gases. Choosing the right oil Not all oils produce the same ultimate pressure in a given pump. Ultimate pressure depends on the saturated vapour pressure of the oil, its viscosity and its ability to dissolve gases. Good pumping conditions are related to the type of oil used. The choice depends on: – Expected pump performance. – Chemical aggression and corrosion of pumped gases. – Accessories used. – Desired maintenance intervals and total operating cost. The manufacturer has selected various types of oil for its pumps (see page 18). Lubrication and The pump is equipped with a lubrication system which regulates the oil flow rate anti-noise device required in the vacuum pump. In addition this system also ensures the gassing of the lubrication oil and therefore the low noise level of the pump. Gas ballast When condensable vapours are being In. Exh. pumped, gas is compressed beyond its saturated vapour pressure in the “compression” phase and can condense, impairing pump performance. air The gas ballast can be used to inject a certain quantity of air (neutral or dry gas) into the last stage of the pump COMPRESSION during the “compression” phase so that the partial pressure of the pumped gas is less than its saturated vapour pressure at the temperature of the pump. Condensation is therefore impossible if this limit is not reached. The maximum admissible vapour pressure is obtained at th e pump inlet for this value. At the end of “compression”, the pressure in the exhaust chamber is greater than atmospheric pressure. An anti-suckback device (valve + spring) prevents the gases and oil from being drawn back into the inlet. The saturated vapour pressure of a body is higher when the system is hot than when it is cold; therefore, the pump must reach operating temperature before pumping condensable vapours.  Using the gas ballast increases the ultimate pressure of the pump as well as the temperature.  The gas ballast control, located at the front of the oil case cannot be used to set the gas injection flow rate.  When the gas ballast control is open, the pump is not tight when stopped. To guarantee this tightness, install an automatic gas ballast.  The functioning in permanent regime with opened gas ballast draws away important oil losses (mist) by exhaust: use an accessory OME 25 HP + ODK (see page 12) and control the oil level very often. C1 and C2 pump series: Because of the danger present if the gas ballast (C1 series) or bubbler (C2 series) was to be opened to atmosphere, connect the ports to a neutral gas supply line (see page 35). EN – 8 n Technical characteristics o i t c u d o r t n I SD, I, C1 Models Characteristics Unit 1005 SD 1015 SD 2005 2010 2015 2021 Frequency Hz 50 60 50 60 50 60 50 60 50 60 50 60 Number of stages 1 1 2 2 2 2 Rotation speed tr/mn 1500 1800 1500 1800 1500 1800 1500 1800 1500 1800 1500 1800 Pumping speed m3/h 5 6 14 16,5 5 6 9 10,5 14 16,5 18 22 Max. Gas throughput hPa · l/s 1256 1547 3805 4500 1350 1547 2722 3263 4222 5063 5833 6977 Partial ultimate pressure (1) Torr/hPa - 7.5 · 10-4 / 1 · 10-4 Ultimate pressure with gas ballast closed Torr/hPa 3.75 · 10-4 / 5 · 10-4 3.75 · 10-4 / 5 · 10-4 3.75 · 10-4 / 5 · 10-4 (2) Ultimate pressure with gas ballast open (2) Torr/hPa 3 / 4 5.25 / 7 7.5 · 10-3 / 1 · 10-2 Maximum pressure at inlet in continuous operation • without oil recovery Torr/hPa < 75 / 100 < 8 / 10 • with oil recovery < 760 / 1013 < 75 / 100 N Maximum exhaust relative overpressure hPa 500 E Pump tightness hPa · l/s < 5 · 10-6 Oil capacity l 1.1 1.0 0.83 0.95 0.95 0.98 Maximum water vapour pumping hPa 30 25 35 30 35 25 20 15 12 10 7 7 capacity (1) (3) Water vapour pumping capacity g/h 120 130 330 370 120 110 125 100 110 100 90 90 Emission sound pressure level without dB (A) < 52 < 54 < 54 < 56 < 55 < 55 < 55 < 55 < 55 < 56 < 55 < 56 Gas Ballast (4) Weight (pump + motor) (5) kg (lbs) 21 (46) 24.5 (54) 25 (55) 26 (57) 27 (59.5) 28 (62) Inlet and exhaust end fittings DN 25 ISO-KF (1) ......Partial pressure measured according to Pneurop 6602 specifications, with a capacitive diaphragm pressure gauge and a liquid nitrogen trap. (2) .....Ultimate pressure and vapour pressure measured according to Pneurop 6602 specifications, with a capacitive diaphragm pressure gauge. Note: The measurements are made when the pump is filled with A120 oil for I, SD, SDI, C1 models. Pressure may vary if other oils are used (see page 19). Pressure measurements made with a gauge other than a capacitive gauge will give varying pressure results (partial pressure, ultimate pressure or vapour pressure). (3) .....Vapor pressure measured with an automatic gas ballast. (4) .....The sound level of I, SD, C1 models is under this maximum value. (5) .....These values are for pumps equipped with single-phase motors. SDI Models The SDI pump characteristics correspond to the SD model (see table above) when the intermediate port is at low pressure, i.e. < 1 hPa. Pumping through intermediate port Unit 2005 SDI Ultimate pressure hPa < 1 Flow rate (at ultimate pressure) m3/h ≥ 0.1 1/8 Gas female equipped with a plug. Connecting port Customer is in charge of the connection. The pressure at the intermediate port increases versus the pumping speed. The manufacturer guarantees the maximum pumping speed and the ultimate pressure. The complete product performance depends on the customer’s application. EN – 9