Lecture Notes in Electrical Engineering 268 Corrado Di Natale Vittorio Ferrari Andrea Ponzoni Giorgio Sberveglieri Marco Ferrari Editors Sensors and Microsystems Proceedings of the 17th National Conference, Brescia, Italy, 5-7 February 2013 Lecture Notes in Electrical Engineering Volume 268 For further volumes: http://www.springer.com/series/7818 Corrado Di Natale (cid:129) Vittorio Ferrari Andrea Ponzoni (cid:129) Giorgio Sberveglieri Marco Ferrari Editors Sensors and Microsystems Proceedings of the 17th National Conference, Brescia, Italy, 5-7 February 2013 Editors Corrado Di Natale Vittorio Ferrari Department of Electronic Engineering Department of Information Engineering University of Rome Tor Vergata University of Brescia Rome, Italy Brescia, Italy Andrea Ponzoni Giorgio Sberveglieri SENSOR Laboratory, IDASC Department of Information Engineering National Research Council (CNR) University of Brescia Brescia, Italy Brescia, Italy Marco Ferrari Department of Information Engineering University of Brescia Brescia, Italy ISSN 1876-1100 ISSN 1876-1119 (electronic) ISBN 978-3-319-00683-3 ISBN 978-3-319-00684-0 (eBook) DOI 10.1007/978-3-319-00684-0 Springer Cham Heidelberg New York Dordrecht London Library of Congress Control Number: 2013953711 © Springer International Publishing Switzerland 2014 This work is subject to copyright. 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Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com) Contents Part I Physical Sensors Investigation of Seebeck Effect in Metal Oxide Nanowires for Powering Autonomous Microsystems .................................. 3 Simone Dalola, Vittorio Ferrari, Guido Faglia, Elisabetta Comini, Matteo Ferroni, Caterina Soldano, Dario Zappa, and Giorgio Sberveglieri Piezopolymer Interdigital Transducers for a Structural Health Monitoring System ................................................. 9 L. Capineri, A. Bulletti, M. Calzolai, and D. Francesconi Noise and Performance of Magnetic Nanosensor Based on Superconducting Quantum Interference Device ......................... 13 C. Granata, R. Russo, E. Esposito, S. Rombetto, and A. Vettoliere Nonintrusive IR Sensor for Real-Time Measurements of Gas Turbine Inlet Temperature ................................................................. 19 E. Golinelli, S. Musazzi, U. Perini, and F. Barberis Thermally Actuated Microfl uidic System for Polymerase Chain Reaction Applications .......................................................................... 23 D. Caputo, G. De Cesare, A. De Pastina, P. Romano, R. Scipinotti, N. Stasio, and A. Nascetti Microfl uidic Sensor for Noncontact Detection of Cell Flow in a Microchannel............................................................................................ 29 M. Demori, V. Ferrari, P. Poesio, R. Pedrazzani, N. Steimberg, and G. Mazzoleni A Comparison Between Fresh and Thermally Aged Polyaniline Prepared by Different Approaches: On the Conductivity Under High Pressure ...................................................................................... 35 C. Della Pina, M. Rossi, and E. Falletta v vi Contents Thermal Sensor for Fire Localization ........................................................... 41 M. Norgia, A. Magnani, and A. Pesatori Localization, Recognition, and Classifi cation of a Superfi cial Seismic Source in an Inhomogeneous Mean ...................... 47 F. Lo Castro, M. De Luca, and S. Iarossi Design and Fabrication of a Compact p–v Probe for Acoustic Impedance Measurement .......................................................... 53 M. Piotto, A.N. Longhitano, P. Bruschi, M. Buiat, G. Sacchi, and D. Stanzial Functional Comparison of Acoustic Admittance Measurements with a CMOS- Compatible p–v Microprobe and a Reference One ............. 57 D. Stanzial, M. Buiat, G. Sacchi, P. Bruschi, and M. Piotto Design and Characterization of a Micro-opto- mechanical Displacement Sensor ....................................... 61 E. Schena, M. Cidda, D. Accoto, M. Francomano, G. Pennazza, E. Guglielmelli, and S. Silvestri Multisensor Acoustical Systems: Calibration and Related Problems ........ 67 S. Ameduri, O. Petrella, V. Quaranta, G. Betta, and M. Laracca Automatic System to Measure the Impedance of Piezoelectric Actuators Used in Ultrasonic Scalpels .......................................................... 71 A. Bulletti, L. Capineri, and D. Floridia Part II Chemical Sensors Amperometric Determination of Strong Oxidising Species Through Titanium Electrode Systems ........................................................... 77 F. Terzi, B. Zanfrognini, J. Pelliciari, L. Pigani, C. Zanardi, and R. Seeber Oligopeptides-Based Gas Sensing for Food Quality Control ...................... 83 D. Pizzoni, P. Pittia, M. Del Carlo, D. Compagnone, and C. Di Natale Dissolved Oxygen Sensor Based on Reduced Graphene Oxide .................. 89 S.G. Leonardi, D. Aloisio, M. Latino, N. Donato, and G. Neri COST Action TD1105 on New Sensing Technologies for Air-Pollution Control and Environmental Sustainability: Overview in Europe and New Trends............................................................ 95 Michele Penza A Smart System to Detect Volatile Organic Compounds Produced by Hydrocarbons on Seawater ..................................................... 99 A. Tonacci, D. Corda, G. Tartarisco, G. Pioggia, and C. Domenici Contents vii Electrical and Morphological Characterization of TiO Electrospun Nanofi bers ..................................................................... 103 2 S. Capone, C. De Pascali, A. Taurino, M. Catalano, P. Siciliano, E. Zampetti, and A. Macagnano A Handy Method for Reproducible and Stable Measurements of VOC at Trace Level in Air ................................................ 109 A. Demichelis, G. Sassi, and M.P. Sassi UV Effect on Indium Oxide Resistive Sensors ............................................. 115 S. Trocino, P. Frontera, A. Donato, C. Busacca, P. Antonucci, and G. Neri P-Type NiO Thin Films Prepared by Sputtering for Detection of Pollutants .............................................................................. 121 Raj Kumar, C. Baratto, G. Faglia, G. Sberveglieri, E. Bontempi, and L. Borgese Well-Ordered Titania Nanostructures for Gas Sensing .............................. 127 V. Galstyan, E. Comini, A. Ponzoni, N. Poli, G. Faglia, G. Sberveglieri, E. Bontempi, and M. Brisotto A Disposable Ammonia Sensor by Low-Cost Ink-Jet Printing Technology ........................................................................... 133 B. Andò, S. Baglio, G. Di Pasquale, C.O. Lombardo, and V. Marletta Reproducibility of the Performances of Graphene-Based Gas-Sensitive Chemiresistors ......................................................................... 139 Ettore Massera, Maria Lucia Miglietta, Tiziana Polichetti, Filiberto Ricciardella, and Girolamo Di Francia Exfoliation of Graphite and Dispersion of Graphene in Solutions of Low-Boiling-Point Solvents for Use in Gas Sensors ........... 143 Filippo Fedi, Filiberto Ricciardella, Tiziana Polichetti, Maria Lucia Miglietta, Ettore Massera, and Girolamo Di Francia A High-Resistance Measurement Setup for MOX Sensing Materials Characterization ............................................................................ 149 P.P. Capra, F. Galliana, M. Latino, A. Bonavita, N. Donato, and G. Neri A Portable Gas Sensor System for Air Quality Monitoring ........................ 155 Domenico Suriano, Gennaro Cassano, and Michele Penza Part III Biosensors Herbicide Analysis Using a New OPIE. A Case Study: Sunfl ower Oil ...... 161 E. Martini, M. Tomassetti, and L. Campanella Electrochemical Immunoassay for Mucin 1 Detection as a Diagnostic Tool in Ovarian Cancer ........................................................ 165 Andrea Ravalli, Giovanna Marrazza, Anca Florea, Cecilia Cristea, and Robert Sandulescu viii Contents Monitoring Photocatalytic Treatment of Olive Mill Wastewater (OMW) in Batch Photoreactor Using a Tyrosinase Biosensor and COD Test ................................................ 169 E. Martini, M. Tomassetti, and L. Campanella Electrochemical Antibody-Aptamer Assay for VEGF Cancer Biomarker Detection ....................................................... 175 Andrea Ravalli, Giovanna Marrazza, Lourdes Rivas, Alfredo De La Escosura-Muniz, and Arben Merkoci Electrochemical Liposome-Based Biosensors for Nucleic Acid Detection .............................................................................. 179 Diego Voccia, Francesca Bettazzi, and Ilaria Palchetti On-Chip Diagnosis of Celiac Disease by an Amorphous Silicon Chemiluminescence Detector ............................. 183 D. Caputo, G. de Cesare, R. Scipinotti, N. Stasio, F. Costantini, C. Manetti, and A. Nascetti Development and Characterization of a Novel Antibacterial Material Based on GOx Immobilized in a PVA Film .................................. 189 M.R. Guascito, D. Chirizzi, L. Giotta, and L. Stabili Development of a QCM (Quartz Crystal Microbalance) Biosensor to Detection of Mycotoxins ........................................................... 195 K. Spinella, L. Mosiello, G. Palleschi, and F. Vitali Label-Free Biosensor Based on Copolymer- Functionalized Optical Fiber Long-Period Grating ........... 199 F. Chiavaioli, C. Trono, A. Giannetti, M. Brenci, and F. Baldini Part IV Optical Sensors Chemiluminescence-Based Micro-Total- Analysis System with Amorphous Silicon Photodiodes ............................................................ 207 D. Caputo, G. de Cesare, R. Scipinotti, M. Mirasoli, A. Roda, M. Zangheri, and A. Nascetti Optical Spectroscopy for Hogwash Oil Detection in Soybean Chinese Oils ................................................................................. 213 L. Ciaccheri, A.G. Mignani, A. Cichelli, J. Xing, X. Yang, W. Sun, and L. Yuan Ultra-compact Optical Fiber Fabry-Perot Interferometer Based on In-Line Integrated Submicron Silicon Film ................................. 217 A. Micco, G. Quero, A. Crescitelli, A. Ricciardi, and A. Cusano Polymer Microfl ow Cytofl uorometer ............................................................ 223 G. Testa, G. Persichetti, and R. Bernini Contents ix On the Design of a Clad-Etched Fiber Bragg Grating Sensor for Magnetic Field Sensing Applications....................................................... 227 A. Saccomanno, D. Pagnano, A. Irace, A. Cusano, M. Giordano, and G. Breglio Moisture Measurement System for Brick Kiln ............................................ 233 M. Norgia and A. Pesatori Breath Figures onto Optical Fibers for Miniaturized Sensing Probes ................................................................... 237 Marco Pisco, Giuseppe Quero, Agostino Iadicicco, Michele Giordano, Francesco Galeotti, and Andrea Cusano Sensitivity of Wood-Rayleigh Anomalies in Metallic Nanogratings ........... 241 A. Ricciardi, S. Savoia, A. Crescitelli, V. Galdi, A. Cusano, and E. Esposito Sensored Handheld Fiber-Optic Delivery System for Controlled Laser Ablation ........................................................................ 245 I. Cacciari, A.A. Mencaglia, and S. Siano Differential Pulse-Width Pair Brillouin Optical Time-Domain Analysis Employing Raman Amplifi cation and Optical Pulse Coding ............................................................................... 251 M. Taki, M. Soto, F. Di Pasquale, and G. Bolognini Water-Jet Waveguide for Fluorescence Spectroscopy ................................. 255 G. Persichetti, G. Testa, and R. Bernini Part V Microsystems Moore’s II Law and Microsystems Manufacturing ..................................... 263 U. Mastromatteo Development of a Low Cost Planar Micro Thermoelectric Generator .............................................................................. 267 S. Pelegrini, A. Adami, C. Collini, P. Conci, L. Lorenzelli, and A.A. Pasa Dielectric Layers for MEMS Deposited at Room Temperature by HMDSO-PECVD ................................................................ 273 P. Colombi, A. Borgese, M. Ferrari, and V. Ferrari Label-Free Detection of Specifi c RNA Sequences by a DNA-Based CMOS BioMEMS .............................................................. 277 Lorena Tedeschi, Claudio Domenici, Vincenzo Russino, Andrea Nannini, and Francesco Pieri Thin Film Device for Background Photocurrent Rejection in Biomolecular Analysis Systems ................................................................. 281 D. Caputo, G. De Cesare, R. Scipinotti, and A. Nascetti