Mechanisms and Machine Science Erwin-Christian Lovasz Gondi Kondaiah Ananthasuresh Burkhard Corves Victor Petuya Editors Microactuators and Micromechanisms Proceedings of MAMM 2014, Timisoara, Romania, October 2–4, 2014 Mechanisms and Machine Science Volume 30 Series editor Marco Ceccarelli, Cassino, Italy More information about this series at http://www.springer.com/series/8779 Erwin-Christian Lovasz (cid:129) Gondi Kondaiah Ananthasuresh (cid:129) Burkhard Corves (cid:129) Victor Petuya Editors Microactuators and Micromechanisms Proceedings of MAMM 2014, Timisoara, Romania, October 2-4, 2014 Editors Erwin-ChristianLovasz GondiKondaiahAnanthasuresh DepartmentofMechatronics MechanicalEngineering UniversityPolitehnicaTimisoara IndianInstituteofScience Timisoara,Romania Bangalore,India BurkhardCorves VictorPetuya Institutfu¨rGetriebetechnikund DepartmentofMechanicalEngineering Maschinendynamik UniversityoftheBasqueCountry RWTHAachenUniversity Bilbao,Spain Aachen,Germany ISSN2211-0984 ISSN2211-0992 (electronic) MechanismsandMachineScience ISBN978-3-319-15861-7 ISBN978-3-319-15862-4 (eBook) DOI10.1007/978-3-319-15862-4 LibraryofCongressControlNumber:2015937012 SpringerChamHeidelbergNewYorkDordrechtLondon ©SpringerInternationalPublishingSwitzerland2015 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartof the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation,broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionor informationstorageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilar methodologynowknownorhereafterdeveloped. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexempt fromtherelevantprotectivelawsandregulationsandthereforefreeforgeneraluse. Thepublisher,theauthorsandtheeditorsaresafetoassumethattheadviceandinformationinthisbook arebelievedtobetrueandaccurateatthedateofpublication.Neitherthepublishernortheauthorsorthe editorsgiveawarranty,expressorimplied,withrespecttothematerialcontainedhereinorforanyerrors oromissionsthatmayhavebeenmade. Printedonacid-freepaper Springer International Publishing AG Switzerland is part of Springer Science+Business Media (www.springer.com) Committees WorkshopChairman Erwin-ChristianLovasz(Romania) WorkshopCo-Chairmen GondiKondaiahAnanthasuresh(India) BurkhardCorves(Germany) VictorPetuya(Spain) InternationalScientificCommittee BrianJensen(USA) GondiKondaiahAnanthasuresh(India) BurkhardCorves(Germany) AmitabhaGhosh(India) AntoniGronowicz(Poland) Karl-HeinzModler(Germany) VictorPetuya(Spain) AnupamSaxena(India) Ionu¸tDoroftei(Romania) HidetsuguTerada(Japan) SrikarVengalattore(Canada) NielsModler(Germany) YaoYan-An(P.R.China) LenaZentner(Germany) LocalOrganisingCommittee CorinaMihaelaGruescu Inocen¸tiuManiu ValentinCiupe IosifCa˘ra˘bas¸ NicolaeMirceaDehelean ValerDolga v vi Committees FlorinaPop CristianPop DanTeodorMa˘rgineanu CristianEmilMoldovan EugenSeverZa˘bava˘ WiththeSupportoftheRomanianIFToMMNationalCommittee–ARoTMM Ionu¸tDoroftei DoinaP^asla˘ Erwin-ChristianLovasz EugenMerticaru Preface The third Conference on Microactuators and Micromechanisms, MAMM-2014, was organized by the Department of Mechatronics at the Faculty of Mechanical Engineering, Politehnica University of Timisoara, under the patronage of the International Federation for the Promotion of Mechanism and Machine Science (IFToMM) Technical Committees for Linkages and Mechanical Controls and for Micromachines. The Conference aims to bring together researchers and students who develop theirworkindisciplinesassociatedwithmicromechanismsandmicroactuatorsina friendly, colleague-like, and collaborative environment. MAMM-2014 offers a great opportunity for scientists all over the world to present their achievements, exchangeinnovativeideas,andcreatesolidinternationallinks.Thescientificevent wasmeanttogatherthenoveltyandoriginalityinmachinescienceandtodepictthe trendofthisimportantandcreativefield. ThetopicsproposedfortheConferenceareMicroactuatorsandmicro-assembly, Microsensorsinvolvingmovablesolids,Micro-opto-mechanicaldevice,Mechan- ical tools for cell and tissue studies, Micromanipulation and micro-stages, Micro- scaleflightandswimming,Micro-roboticsandsurgicaltools,Micron-scalepower generation, Miniature manufacturing machines, Micromechatronics and micro- mechanisms, Biomechanics micro and nano scales and Control issues in microsystems. We would like to express our grateful thanks to IFToMM, to the Romania IFToMMNationalCommittee(ARoTMM),andtothemembersoftheInternational ScientificCommitteeofMAMM-2014. WeappreciatetheeffortofthereviewersgatheredintheInternationalScientific CommitteeofMAMM-2014.Theyspenttimeonaseriousworkofevaluationand improvementguidance,meanttoassurehighqualityinallpapers. We thank the authors, who contributed with valuable papers on different sub- jectscoveringthewidescientificfielsofMechanismsandMachineScience. We thank the Department of Mechatronics at the Faculty of Mechanical Engi- neering, Politehnica University of Timisoara, for hosting the scientific event and vii viii Preface supporting all associated activities. The third Conference on Microactuators and Micromechanisms became a reality due to a hardworking local organizing team: GruescuCorinaMihaela,Inocen¸tiuManiu,ValentinCiupe,IosifCa˘ra˘bas¸,Nicolae MirceaDehelean,ValerDolga,FlorinaPop,CristianPop,DanTeodorMa˘rgineanu, CristianEmilMoldovan,andEugenSeverZa˘bava˘. Last but not least, we are grateful to the staff at Springer Publishing for their excellenttechnicalandeditorialsupport. Timisoara,Romania Erwin-ChristianLovasz September2014 GondiKondaiahAnanthasuresh BurkhardCorves VictorPetuya Contents ACompliantMechanismasRockerArmwithSpringCapability forPrecisionEngineeringApplications. . .. . . . .. . . .. . . .. . . .. . . . 1 L.HartmannandL.Zentner SteeringandNon-steeringCrawlingTetrahedral Micro-mechanisms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 D.Ma˘rgineanu,E.-C.Lovasz,K.-H.Modler,andC.M.Gruescu NewKinematicDesignsofFlexureHingeBased3DoF TranslationalMicromanipulators. . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 I.Prause,D.Schoenen,andB.Corves DevelopmentofAdaptiveCompliantGripperFinger withEmbeddedActuators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 A.Milojevic´ andN.D.Pavlovic´ OverviewandClassificationofFlexureHingeBased Micromanipulators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 D.Schoenen,I.Prause,S.Palacios,andB.Corves AxisCross-CouplingReductiononaHighBandwidth XYFlexureStage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 A.Ruiz,F.J.Campa,O.Altuzarra,V.Petuya,C.Pinto,andA.Herna´ndez SomeStructuralandKinematicCharacteristicsofMicro WalkingRobots. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73 Adr.Comanescu,I.Dugaesescu,andD.Comanescu Developmentofa3-DOFCompliantRoboticLocalStructure withLargeTwistAngle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87 S.Kurtenbach,J.Siebrecht,D.Schoenen,M.Hu¨sing,andB.Corves AHexapodWalkingMicro-robotwithArtificialMuscles. . . . . . . . . . 99 I.Doroftei ix